JPS6236600Y2 - - Google Patents
Info
- Publication number
- JPS6236600Y2 JPS6236600Y2 JP1983171869U JP17186983U JPS6236600Y2 JP S6236600 Y2 JPS6236600 Y2 JP S6236600Y2 JP 1983171869 U JP1983171869 U JP 1983171869U JP 17186983 U JP17186983 U JP 17186983U JP S6236600 Y2 JPS6236600 Y2 JP S6236600Y2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical container
- container
- polishing
- polisher
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 32
- 239000006061 abrasive grain Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983171869U JPS6080852U (ja) | 1983-11-08 | 1983-11-08 | ２層式研磨皿容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983171869U JPS6080852U (ja) | 1983-11-08 | 1983-11-08 | ２層式研磨皿容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6080852U JPS6080852U (ja) | 1985-06-05 |
| JPS6236600Y2 true JPS6236600Y2 (en]) | 1987-09-17 |
Family
ID=30374798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983171869U Granted JPS6080852U (ja) | 1983-11-08 | 1983-11-08 | ２層式研磨皿容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6080852U (en]) |
-
1983
- 1983-11-08 JP JP1983171869U patent/JPS6080852U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6080852U (ja) | 1985-06-05 |
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